Hitachi Wafer Alignment Unit M-712E 200mm Shallow Trench Etcher Working img{max-width:100%} TEL Tokyo Electron 5087-400486-15

img{max-width:100%} TEL Tokyo Electron 5087-400486-15 Valve Assembly DEV

Part No: 210-13151-00

Inventory # 19700

Inventory # G7758

Hard Disk: None

Hitachi Wafer Alignment Unit M-712E 200mm Shallow Trench Etcher Working img{max-width:100%} TEL Tokyo Electron 5087-400486-15Hitachi Wafer Alignment Unit M 712E 200mm Shallow Trench Etcher Working Spare Part No: Alignment Unit Removed from a Hitachi M 712E 200mm Shallow Trench Etcher System Installed Components PCB Part No: HT98311, BD11 Rorze 2P Micro Step Drive Part No: RD 023MS SunX Laser Line Sensor Part No: LD 601 This item is used working surplus. The panels have some minor scuffs (see photos). The physical condition is good, but there are signs of previous use and